Get Analysis and Design Principles of MEMS Devices PDF

By Minhang Bao

ISBN-10: 008045562X

ISBN-13: 9780080455624

ISBN-10: 0444516166

ISBN-13: 9780444516169

Sensors and actuators are actually a part of our daily life and seem in lots of home equipment, comparable to vehicles, merchandising machines and washing machines. MEMS (Micro Electro Mechanical platforms) are micro platforms such as micro mechanical sensors, actuators and micro digital circuits. various MEMS units were constructed and lots of mass produced, however the details on those is generally dispersed within the literature. This publication provides the research and layout ideas of MEMS units. the data is complete, targeting microdynamics, reminiscent of the mechanics of beam and diaphragm buildings, air damping and its influence at the movement of mechanical buildings. utilizing sensible examples, the writer examines difficulties linked to research and layout, and options are integrated behind the ebook. the suitable complex point textbook for graduates, Analysis and layout ideas of MEMS Devices is an acceptable resource of reference for researchers and engineers within the box.

* provides the research and layout ideas of MEMS units extra systematically than ever before.

* contains the theories crucial for the research and layout of MEMS comprises the dynamics of micro mechanical structures

* an issue part is integrated on the finish of every bankruptcy with solutions supplied on the finish of the publication.

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For example, for the x-plane, the normal stress component caused by a force in the x-direction is defined as positive but that caused by a force in the x -direction is defined as negative. The stress component caused by the tangential forces on the x-plane and in the y- and z-directions are defined as positive while those by tangential forces in the y - and z -directions are defined as negative. Furthermore, for the y plane, the stress component caused by a force in the y -direction is positive but that caused by a force in the jy-direction is negative.

The vibration amplitude in the ^-direction can be detected by some sensing schemes and used as a measure of angular rate Q. As a Coriolis force is usually extremely weak, it is important to make full use of the amplification effect of mechanical resonance and to keep the noise level low in the signal bandwidth. Therefore, the driving frequency, cod, and the two resonant frequencies, cox and ay, have to be designed carefully, and sophisticated electronic circuits have to be used. Fig. 4 shows a schematic diagram of a comb-drive resonator micro-gyroscope [23].

Bao, Over-range capacity of a piezoresistive microaccelerometer, Sensors and Actuators A58 (1997) 197-201 [14] S. K. Clark, K. D. Wise, Pressure sensitivity in anisotropically etched thindiaphragm pressure sensors, IEEE Trans, on Electron Devices, Vol. ED-26 (1979) 18871896 [15] W. Ko, M. Bao, Y. Hong, A high sensitivity integrated circuit capacitive pressure transducer, IEEE Trans, on Electron Devices, Vol. ED-29 (1982) 48-56 [16] W. Ko, Q. Wang, Q. Wu, Long term stability capacitive pressure sensor for medical implant, Digest of Technical Papers, The 7th International Conference on SolidState Sensors and Actuators, Yokohama, Japan, June7-10, 1993 (Transducers'93) 592-595 [17] F.

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Analysis and Design Principles of MEMS Devices by Minhang Bao

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